A new structure for RF MEMS resonators is demonstrated in UHF range. The presented resonator has the ability to work in multiple resonance modes by its specific anchor design. Also, its special electrodes are designed so that the desired mode at any time could be excited by embedding simple MOS switches. Since the resonance frequency of different modes could be adjusted by the inner radius of the resonator, the structure could be designed for wide range of arbitrary frequency differences between modes. Specific electrodes and anchors design guarantees low insertion loss and high quality factor in all modes. Modal and harmonic analysis verify our approach.
