Thermoelastic damping is one of the most important energy loss mechanisms in MEMS resonators especially when the resonator is miniaturized to achieve higher frequencies. Based on thermal energy produced as the result of the resonator expansion and contraction, by considering the thermoelastic coupled equation, this article presents a solution to thermoelastic damping for previously demonstrated ring shape anchored contour mode disk RF MEMS resonator. This research proves that the thermoelastic damping has a negligible effect on the quality factor of the resonator. In addition the results mention that this effect becomes stronger when the surface to volume ratio is decreased for achieving higher frequency resonators. Obtained results reveal that the resonator could be utilized for ultra-low far-from-carrier phase noise oscillators.
